Publication | Closed Access
Hydrogen plasma chemical cleaning of metallic substrates and silicon wafers
82
Citations
19
References
1995
Year
Materials ScienceChemical EngineeringEngineeringCorrosionNonthermal PlasmaSurface ScienceApplied PhysicsSemiconductor Device FabricationHydrogenMetallic SubstratesGas Discharge PlasmaPlasma EtchingPlasma Processing
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