Concepedia

Norman Korner

NK

2

Publications

122

Citations

2

H-Index

1995

Active since

Affiliations

Oerlikon (Liechtenstein)(Current)

Norman Korner is an author at Oerlikon (Liechtenstein) specializing in engineering, chemical engineering, and applied physics.

Top concepts

EngineeringChemical EngineeringPhysicsHydrogenChemistryCorrosionSpectroscopyPlasma TheoryChromatographyPlasma Physics

Publications per year

1995–1999

2

Publications

2

Hydrogen plasma chemical cleaning of metallic substrates and silicon wafers

Norman Korner, E. Beck, Alex Dommann et al. · Surface and Coatings Technology · 1995 · 82 citations

Materials Science, Chemical Engineering, Engineering +10

Mass spectrometric measurements on inductively coupled fluorocarbon plasmas: Positive ions, radicals and endpoint detection

Xi Li, M. Schaepkens, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 40 citations

Engineering, Atomic Emission Spectroscopy, Biological Mass Spectrometry +23

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