Concepedia

A. Züger

AZ

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Publications

1

Citations

25

H-Index

1

Active since

1992

Affiliations

University of Zurich(Current)

A. Züger is an author at University of Zurich specializing in microfabrication, applied physics, and instrumentation.

Top concepts

Publications per year

1992–1992

1

Publications

1

Low-temperature in situ cleaning of silicon wafers with an ultra high vacuum compatible plasma source

J. Ramm, E. Beck, A. Züger et al. · Thin Solid Films · 1992 · 25 citations

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