Statistics
Publications
2
Citations
45
H-Index
2
Active since
2000
Affiliations
C. S. Hsiung is an author at United Microelectronics (Taiwan) specializing in materials science, metallic materials, and thin film electrical properties.
Publications per year
2000–2002
2
2
Ta and Ta–N diffusion barriers sputtered with various N2/Ar ratios for Cu metallization
J. H. Wang, L. J. Chen, Zhenchuan Lu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 23 citations
Natural Sciences, Materials Engineering, Materials Science +17
Jiumei Hu, T. C. Chang, Chia‐Hua Wu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 22 citations
Natural Sciences, Materials Engineering, Materials Science +11
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