Sommawan Khumpuang

Publications

358

Citations

H-Index

2002

Active since

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Ritsumeikan University

Sommawan Khumpuang is an author at National Institute of Advanced Industrial Science and Technology specializing in engineering, microfabrication, and mechanical engineering.

ORCID

Top concepts

EngineeringMicrofabricationMechanical Engineering3D PrintingApplied PhysicsMicrofluidicsMaterial ScienceBiomedical EngineeringMicroelectronicsIntegrated Circuits

Publications per year

2002–2019

Publications

Plain-pattern to cross-section transfer (PCT) technique for deep x-ray lithography and applications

Susumu Sugiyama, Sommawan Khumpuang, Gaku Kawaguchi · Journal of Micromechanics and Microengineering · 2004 · 59 citations

Mems Devices, Engineering, Electron-beam Lithography +24

A MOSFET Fabrication Using a Maskless Lithography System in Clean-Localized Environment of Minimal Fab

Sommawan Khumpuang, Shiro Hara · IEEE Transactions on Semiconductor Manufacturing · 2015 · 54 citations

Minimal Developer, Engineering, Electron-beam Lithography +16

Analyses on Cleanroom-Free Performance and Transistor Manufacturing Cycle Time of Minimal Fab

Sommawan Khumpuang, Fumito Imura, Shiro Hara · IEEE Transactions on Semiconductor Manufacturing · 2015 · 45 citations

Photolithography for Minimal Fab System

Sommawan Khumpuang, Hitoshi Maekawa, Shiro Hara · IEEJ Transactions on Sensors and Micromachines · 2013 · 45 citations

Optical Materials, Engineering, Nanolithography Method +13

Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithography

Sommawan Khumpuang, Mitsuhiro Horade, K. Fujioka et al. · Microsystem Technologies · 2006 · 41 citations

Materials Science, Engineering, Microfabrication +11

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