Statistics
Publications
2
Citations
43
H-Index
2
Active since
2019
Affiliations
ASML (Netherlands)(Current)
Christophe Smeets is an author at ASML (Netherlands) specializing in microelectromechanical systems, engineering, and electron beam lithography.
Publications per year
2019–2023
2
2
Advanced particle contamination control in EUV scanners
Mark van de Kerkhof, Tjarko van Empel, Michael J. Lercel et al. · 2019 · 30 citations
Engineering, Manufacturing Engineering, Digital Fabrication +10
0.33 NA EUV systems for high volume manufacturing
Christophe Smeets, Nico Benders, Frank Bornebroek et al. · 2023 · 13 citations
Engineering, Computer Engineering, Electrical Engineering +11
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