5
Publications
124
Citations
5
H-Index
1938
Active since
Affiliations
Frank Benner is an author at University of Michigan specializing in engineering, surface science, and materials science.
Top concepts
EngineeringSurface ScienceMaterial ScienceApplied PhysicsPetroleum ProductionPetroleum EngineeringRheologyThin FilmsMultiphase FlowMicroelectronics
Publications per year
1938–2014
5
5
Atomic layer deposited high-<i>κ</i> nanolaminates for silicon surface passivation
Frank Benner, Paul M. Jordan, Claudia Richter et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2014 · 23 citations
Materials Science, Conventional Al2o3 Films, Engineering +11
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1–5 of 5