Fumiaki Emoto

Analysis of solid phase crystallization in amorphized polycrystalline Si films on quartz substrates

Akira Nakamura, Fumiaki Emoto, Eiji Fujii et al. · Journal of Applied Physics · 1989 · 56 citations

Materials Science, Quartz Substrates, Engineering +15

8 nm Wide Line Fabrication in PMMA on Si Wafers by Electron Beam Exposure

Fumiaki Emoto, Kenji Gamo, Susumu Namba et al. · Japanese Journal of Applied Physics · 1985 · 28 citations

Engineering, Electron-beam Lithography, Microscopy +18

Recrystallization Mechanism for Solid Phase Growth of Poly-Si Films on Quartz Substrates

Akira Nakamura, Fumiaki Emoto, Eiji Fujii et al. · Japanese Journal of Applied Physics · 1988 · 26 citations · Full text

Engineering, Crystal Growth Technology, Recrystallization Mechanism +16

A laser-recrystallization technique for silicon-TFT integrated circuits on quartz substrates and its application to small-size monolithic active-matrix LCD's

Eiji Fujii, K. Senda, Fumiaki Emoto et al. · IEEE Transactions on Electron Devices · 1990 · 18 citations

Optical Materials, Engineering, Optoelectronic Devices +17

A high-voltage polysilicon TFT with multigate structures

Yasuhiro Uemoto, Eiji Fujii, Fumiaki Emoto et al. · IEEE Transactions on Electron Devices · 1991 · 17 citations

Electrical Engineering, Semiconductor Device, Engineering +11