Concepedia

Kenshi Fukumitsu

KF

Statistics

Publications

10

Citations

478

H-Index

10

Active since

2006

Affiliations

Hamamatsu Photonics (Japan)(Current)

The University of Osaka

Kenshi Fukumitsu is an author at Hamamatsu Photonics (Japan) specializing in engineering, laser material processing, and semiconductor devices.

Publications per year

2006–2014

10

Publications

10

Advanced Dicing Technology for Semiconductor Wafer—Stealth Dicing

Masayoshi Kumagai, Naoki Uchiyama, Etusji Ohmura et al. · IEEE Transactions on Semiconductor Manufacturing · 2007 · 176 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

Development of PET Detectors Using Monolithic Scintillation Crystals Processed With Sub-Surface Laser Engraving Technique

Toshio Moriya, Kenshi Fukumitsu, Tatsuo Sakai et al. · IEEE Transactions on Nuclear Science · 2010 · 73 citations

Engineering, Materials Engineering, Nuclear Engineering +17

Internal modified-layer formation mechanism into silicon with nanosecond laser

Etsuji Ohmura, Fumitsugu Fukuyo, Kenshi Fukumitsu et al. · 2006 · 61 citations

Engineering, Materials Engineering, Materials Science +16

Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer

Etsuji Ohmura, Masayoshi Kumagai, Makoto Nakano et al. · Journal of Advanced Mechanical Design Systems and Manufacturing · 2008 · 42 citations · Full text

Engineering, Materials Engineering, Materials Science +15

Fabrication of Finely Pitched LYSO Arrays Using Subsurface Laser Engraving Technique with Picosecond and Nanosecond Pulse Lasers

Takahiro Moriya, Kenshi Fukumitsu, Takaji Yamashita et al. · IEEE Transactions on Nuclear Science · 2014 · 27 citations

Engineering, Materials Engineering, Materials Science +16

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