Kenshi Fukumitsu

Advanced Dicing Technology for Semiconductor Wafer—Stealth Dicing

Masayoshi Kumagai, Naoki Uchiyama, Etusji Ohmura et al. · IEEE Transactions on Semiconductor Manufacturing · 2007 · 171 citations

Engineering, Wafer Scale Processing, Advanced Packaging (Semiconductors) +16

Development of PET Detectors Using Monolithic Scintillation Crystals Processed With Sub-Surface Laser Engraving Technique

Toshio Moriya, Kenshi Fukumitsu, Tatsuo Sakai et al. · IEEE Transactions on Nuclear Science · 2010 · 73 citations

Engineering, Fine Segmentation, Optical Testing +25

Internal modified-layer formation mechanism into silicon with nanosecond laser

Etsuji Ohmura, Fumitsugu Fukuyo, Kenshi Fukumitsu et al. · 2006 · 61 citations

Engineering, Nanosecond Laser, Laser Applications +21

Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer

Etsuji Ohmura, Masayoshi Kumagai, Makoto Nakano et al. · Journal of Advanced Mechanical Design Systems and Manufacturing · 2008 · 40 citations · Full text

Fabrication of Finely Pitched LYSO Arrays Using Subsurface Laser Engraving Technique with Picosecond and Nanosecond Pulse Lasers

Takahiro Moriya, Kenshi Fukumitsu, Takaji Yamashita et al. · IEEE Transactions on Nuclear Science · 2014 · 27 citations

Nanosecond Pulse Lasers, Engineering, Scintillation Crystal +16