Masayoshi Kumagai

Advanced Dicing Technology for Semiconductor Wafer—Stealth Dicing

Masayoshi Kumagai, Naoki Uchiyama, Etusji Ohmura et al. · IEEE Transactions on Semiconductor Manufacturing · 2007 · 176 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

Depth-profiling of residual stress and microstructure for austenitic stainless steel surface treated by cavitation, shot and laser peening

Masayoshi Kumagai, Matthew E. Curd, Hitoshi SOYAMA et al. · Materials Science and Engineering A · 2021 · 73 citations

Natural Sciences, Materials Engineering, Materials Science +16

Prospect for application of compact accelerator-based neutron source to neutron engineering diffraction

Y. Ikeda, Atsushi Taketani, Masato Takamura et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2016 · 63 citations · Full text

Engineering, Nuclear Engineering, Physics +13

Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer

Etsuji Ohmura, Masayoshi Kumagai, Makoto Nakano et al. · Journal of Advanced Mechanical Design Systems and Manufacturing · 2008 · 42 citations · Full text

Engineering, Materials Engineering, Materials Science +15

Relationship between dislocations and residual stresses in cold-drawn pearlitic steel analyzed by energy-dispersive X-ray diffraction

Shigeo Sato, Kazuaki Wagatsuma, Shigeru Suzuki et al. · Materials Characterization · 2013 · 41 citations

Natural Sciences, Materials Engineering, Materials Science +16