Shamim M. Malik

Overview of plasma source ion implantation research at University of Wisconsin–Madison

Shamim M. Malik, K. Sridharan, R. P. Fetherston et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 52 citations

Electrical Engineering, Ion Implantation, Engineering +13

Development of an energetic ion assisted mixing and deposition process for TiNx and diamondlike carbon films, using a co-axial geometry in plasma source ion implantation

Shamim M. Malik, R. P. Fetherston, J. R. Conrad · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 45 citations

Engineering, Ion Implantation/deposition, Plasma Processing +19

Advances in PSII techniques for surface modification

K.C. Walter, M. Nastasi, Neil Baker et al. · Surface and Coatings Technology · 1998 · 44 citations

Materials Science, Engineering, Functional Surface +4

Distribution of incident ions and retained dose analysis for a wedge-shaped target in plasma source ion implantation

Shamim M. Malik, D. E. Muller, K. Sridharan et al. · Journal of Applied Physics · 1995 · 39 citations

Ion Implantation, Target Face, Ion Beam +8

Sheath dynamics and dose analysis for planar targets in plasma source ion implantation

Shamim M. Malik, R. P. Fetherston, K. Sridharan et al. · Plasma Sources Science and Technology · 1993 · 27 citations

Engineering, Target Fabrication, Biomedical Engineering +16