Sheath thickness and potential profiles of ion-matrix sheaths for cylindrical and spherical electrodes

J. R. Conrad

Journal of Applied Physics

Electrical EngineeringEngineeringPhysicsTransient Ion-matrix SheathApplied Physics +13

Plasma source ion implantation: A new, cost-effective, non-line-of-sight technique for ion implantation of materials

J. R. Conrad, R.A. Dodd, F. J. Worzala, +1

Surface and Coatings Technology

Electrical EngineeringIon ImplantationNon-line-of-sight TechniqueEngineeringApplied Physics +4

Adherent diamond-like carbon coatings on metals via plasma source ion implantation

K.C. Walter, M. Nastasi, C. P. Munson

Surface and Coatings Technology

Materials ScienceMaterials EngineeringDiamond-like CarbonIon ImplantationEngineering +4

Filament activated chemical vapor deposition of boron carbide coatings

Sadanand V. Deshpande, Erdoḡan Gülari, Stephen J. Harris, +1

Applied Physics Letters

Materials EngineeringMaterials ScienceChemical EngineeringBoron NitrideEngineering +11

Formation of buried oxide in silicon using separation by plasma implantation of oxygen

Jingbao Liu, S. Sundar Kumar Iyer, Chenming Hu, +4

Applied Physics Letters

Materials SciencePlasma ImplantationIon ImplantationEngineeringBuried Oxide +11

Characteristics of a plasma doping system for semiconductor device fabrication

Tt Sheng, Susan B. Felch, C. B. Cooper

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

SemiconductorsSemiconductor DevicesElectrical EngineeringIon ImplantationEngineering +11

Microhardness study of amorphous hydrogenated boron carbide deposited on a cathode substrate by plasma deposition

Shu‐Han Lin, Bernard J. Feldman, Dong Li

Applied Physics Letters

EngineeringOptical AbsorptionSemiconductorsBoron NitrideElectronic Devices +15

Materials Science Issues of Plasma Source Ion Implantation

M. Nastasi, Alaa A. Elmoursi, R.J. Faehl, +12

MRS Proceedings

Materials ScienceMaterials EngineeringIon ImplantationEngineeringApplied Physics +3

Structure and properties of amorphous diamond-like carbon films produced by ion beam assisted plasma deposition

Jyh‐Ping Chen, J. R. Conrad, R.A. Dodd

Journal of Materials Engineering and Performance

Materials ScienceDiamond-like CarbonPlasma DepositionEngineeringCarbon-based Material +6

Nitrogen plasma source ion implantation of AISI S1 tool steel

A.M. Redsten, K. Sridharan, F. J. Worzala, +1

Journal of Materials Processing Technology

Materials ScienceIon ImplantationEngineeringCorrosionHigh Strength Low Alloy Steel +3