Plasma source ion implantation: A new, cost-effective, non-line-of-sight technique for ion implantation of materials - Concepedia

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Plasma source ion implantation: A new, cost-effective, non-line-of-sight technique for ion implantation of materials

117

Citations

8

References

1988

Year

J. R. Conrad, R.A. Dodd, F. J. Worzala, X. Qiu

Surface and Coatings Technology

Electrical EngineeringIon ImplantationNon-line-of-sight TechniqueEngineeringApplied PhysicsIon BeamBiomedical EngineeringInstrumentationPlasma Application

References

	Year	Citations

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