Concepedia

Sukbae Joo

SJ

4

Publications

98

Citations

4

H-Index

2008

Active since

Affiliations

Pusan National University(Current)

Sukbae Joo is an author at Pusan National University specializing in materials science, engineering, and mechanical engineering.

Top concepts

EngineeringMaterial ScienceMicrostructureMechanical EngineeringSurface ScienceMicrofabricationMaterial ProcessingChemical EngineeringMaterials EngineeringChemistry

Publications per year

2008–2009

4

Publications

4

Mechanical effect of colloidal silica in copper chemical mechanical planarization

Hyunseop Lee, Sukbae Joo, Haedo Jeong · Journal of Materials Processing Technology · 2009 · 55 citations

Materials Science, Colloidal Material, Engineering +9

The effect of mixed abrasive slurry on CMP of 6H-SiC substrates

Hojun Lee, Boumyoung Park, Sukhoon Jeong et al. · Journal of Ceramic Processing Research · 2009 · 17 citations

Materials Engineering, Materials Science, Chemical Engineering +9

Chemical Mechanical Planarization Method for Thick Copper Films of Micro-Electro-Mechanical Systems and Integrated Circuits

Hyunseop Lee, Sukbae Joo, Hyoungjae Kim et al. · Japanese Journal of Applied Physics · 2008 · 16 citations

Engineering, Mechanical Engineering, Micro-electro-mechanical Systems +22

Effect on Two-Step Polishing Process of Electrochemical Mechanical Planarization and Chemical–Mechanical Planarization on Planarization

Sukhoon Jeong, Sukbae Joo, Hyoungjae Kim et al. · Japanese Journal of Applied Physics · 2009 · 10 citations

Materials Science, Electrometallurgy, Chemical Engineering +14

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