L. H. Szeto

Reduction imaging at 14 nm using multilayer-coated optics: Printing of features smaller than 0.1 μm

J. E. Bjorkholm, Jeffrey Bokor, L. Eichner et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 158 citations

Optical Materials, X-ray Spectroscopy, Engineering +23

Mode locking by synchronous pumping using a gain medium with microsecond decay times

L. F. Mollenauer, Nilson Dias Vieira, L. H. Szeto · Optics Letters · 1982 · 120 citations

Simple metal-vapor recombination lasers using segmented plasma excitation

W. T. Silfvast, L. H. Szeto, O. R. Wood · Applied Physics Letters · 1980 · 41 citations

Optical Materials, Engineering, Segmented Plasma Excitation +22

Soft-x-ray projection lithography: printing of 02-μm features using a 20:1 reduction

Dwight W. Berreman, John H. Bruning, J. E. Bjorkholm et al. · Optics Letters · 1990 · 33 citations

Recombination lasers in expanding CO2 laser-produced plasmas of argon, krypton, and xenon

W. T. Silfvast, L. H. Szeto, O. R. Wood · Applied Physics Letters · 1977 · 29 citations

Photonics, Engineering, Physics +15