Maarten van Drunen

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Publications

Citations

120

H-Index

Active since

2015

Affiliations

Eindhoven University of Technology(Current)

Oxford Instruments (United Kingdom)

Maarten van Drunen is an author at Eindhoven University of Technology specializing in plasma-enhanced atomic layer deposition, atomic layer deposition, and materials science.

Publications per year

2015–2016

Publications

Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride

Chaitanya Krishna Ande, Harm C. M. Knoops, Koen de Peuter et al. · The Journal of Physical Chemistry Letters · 2015 · 68 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(<i>sec</i>-butylamino)silane and N<sub>2</sub>Plasma on Planar and 3D Substrate Topographies

Tahsin Faraz, Maarten van Drunen, Harm C. M. Knoops et al. · ACS Applied Materials & Interfaces · 2016 · 52 citations · Full text

Engineering, Materials Engineering, Materials Science +17

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