Statistics
Publications
2
Citations
38
H-Index
2
Active since
2000
Affiliations
Motorola (United States)(Current)
K. H. Smith is an author at Motorola (United States) specializing in applied physics, engineering, and surface science.
Publications per year
2000–2001
2
2
Cr absorber etch process for extreme ultraviolet lithography mask fabrication
K. H. Smith, James R. Wasson, Pawitter J. S. Mangat et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 25 citations · Full text
Engineering, Electron-beam Lithography, Integrated Circuits +16
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