P.J. Gyugyi

Supervisory control of a rapid thermal multiprocessor

Silvano Balemi, G. Hoffmann, P.J. Gyugyi et al. · IEEE Transactions on Automatic Control · 1993 · 277 citations

Engineering, Computer Engineering, Manufacturing Engineering +17

Control of rapid thermal processing: a system theoretic approach

Young Man Cho, P.J. Gyugyi · IEEE Transactions on Control Systems Technology · 1997 · 43 citations

Engineering, Mechanical Engineering, Systems Engineering +14

Rapid thermal multiprocessing for a programmable factory for adaptable manufacturing of ICs

Krishna C. Saraswat, Pushkar P. Apte, Len Booth et al. · IEEE Transactions on Semiconductor Manufacturing · 1994 · 23 citations

Engineering, Computer Engineering, Manufacturing Engineering +17

<title>Modeling and control of rapid thermal processing</title>

Charles D. Schaper, Young M. Cho, PooGyeon Park et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1992 · 18 citations

Engineering, Mechanical Engineering, Heat Transfer +16

Model-based control of rapid thermal processing systems

P.J. Gyugyi, Y.M. Cho, G.F. Franklin et al. · 2003 · 10 citations

Engineering, Manufacturing Engineering, Heat Transfer +12