Statistics
Publications
3
Citations
61
H-Index
3
Active since
1994
Affiliations
Nikon (Japan)(Current)
Norihiro Katakura is an author at Nikon (Japan) specializing in semiconductor devices, engineering, and microfabrication.
Publications per year
1994–1999
3
3
Stencil reticle development for electron beam projection system
Shintaro Kawata, Norihiro Katakura, Shinichi Takahashi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 27 citations
Engineering, Manufacturing Engineering, Microelectronics +11
Zone-Plate X-Ray Microscope Using a Laser Plasma Source
Shigeru Nakayama, K. Haramura, Guangming Zeng et al. · Japanese Journal of Applied Physics · 1994 · 23 citations
Natural Sciences, Physics, Optics +13
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