Yoshiaki Daigo

Synthesis of epitaxial GaN single-crystalline film by ultra high vacuum r.f. magnetron sputtering method

Yoshiaki Daigo, Nobuki Mutsukura · Thin Solid Films · 2005 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +14

Initial growth control of GaN on Si with physical-vapor-deposition-AlN seed layer for high-quality GaN templates

Hongbo Wang, Hassanet Sodabanlu, Yoshiaki Daigo et al. · Applied Physics Express · 2016 · 16 citations

Engineering, Materials Engineering, Materials Science +17

Impacts of surface C/Si ratio on in-wafer uniformity and defect density of 4H-SiC homo-epitaxial films grown by high-speed wafer rotation vertical CVD

Yoshiaki Daigo, Shigeaki Ishii, Takehiko Kobayashi · Japanese Journal of Applied Physics · 2019 · 16 citations

Engineering, Materials Engineering, Materials Science +17

Structures and luminescence properties of polymer-like a-CNx:H films

Yoshiaki Daigo, Nobuki Mutsukura · Diamond and Related Materials · 2004 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +12

Influence and Suppression of Harmful Effects Due to By-Product in CVD Reactor for 4H-SiC Epitaxy

Yoshiaki Daigo, Tôru Watanabe, Akio Ishiguro et al. · IEEE Transactions on Semiconductor Manufacturing · 2021 · 14 citations

Engineering, Materials Engineering, Materials Science +17