Concepedia

H.R. Deppe

HD

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Publications

2

Citations

58

H-Index

2

Active since

1977

Affiliations

Siemens (Germany)(Current)

H.R. Deppe is an author at Siemens (Germany) specializing in engineering, materials science, and etching processes.

Publications per year

1977–1981

2

Publications

2

Investigations on the damage caused by ion etching of SiO2 layers at low energy and high dose

H.R. Deppe, B. Hasler, Joachim Höpfner · Solid-State Electronics · 1977 · 43 citations

, , +17

Plasma etching of polysilicon and Si<sub>3</sub>N<sub>4</sub>in SF<sub>6</sub>with some impact on MOS device characteristics

W. Beinvogl, H.R. Deppe, R. Stokan et al. · IEEE Transactions on Electron Devices · 1981 · 15 citations

, , +16

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