Concepedia

R. Stokan

RS

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Publications

1

Citations

15

H-Index

1

Active since

1981

Affiliations

Siemens (Germany)(Current)

R. Stokan is an author at Siemens (Germany) specializing in semiconductor materials, etching processes, and silicon.

Publications per year

1981–1981

1

Publications

1

Plasma etching of polysilicon and Si<sub>3</sub>N<sub>4</sub>in SF<sub>6</sub>with some impact on MOS device characteristics

W. Beinvogl, H.R. Deppe, R. Stokan et al. · IEEE Transactions on Electron Devices · 1981 · 15 citations

, , +16

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