Statistics
Publications
13
Citations
263
H-Index
11
Active since
1995
Marco Wedowski is an author at Lawrence Livermore National Laboratory specializing in natural sciences, materials engineering, and materials science.
Publications per year
1995–2003
13
13
Advances in multilayer reflective coatings for extreme ultraviolet lithography
James A. Folta, S. Bajt, Troy W. Barbee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 48 citations
Natural Sciences, Materials Engineering, Materials Science +16
Molecular contamination mitigation in EUVL by environmental control
N.B. Koster, B. Mertens, R. Jansen et al. · Microelectronic Engineering · 2002 · 35 citations
<title>Prevention of MoSi multilayer reflection loss in EUVL tools</title>
H. Meiling, B. Mertens, F. Stietz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 21 citations
Natural Sciences, Materials Engineering, Materials Science +16
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