Concepedia

Takashi Yoda

TY

6

Publications

556

Citations

6

H-Index

1999

Active since

Affiliations

Toshiba (Japan)(Current)

Japan Science and Technology Agency

Tohoku University

Takashi Yoda is an author at Toshiba (Japan) specializing in materials science, engineering, and materials engineering.

Top concepts

EngineeringMaterial ScienceApplied PhysicsMaterials EngineeringElectronic PackagingElectrical EngineeringThin FilmsMicroelectronicsElectronic MaterialsChemistry

Publications per year

1999–2006

6

Publications

6

Self-assembly of a silica–surfactant nanocomposite in a porous alumina membrane

A. Yamaguchi, Fumiaki Uejo, Takashi Yoda et al. · Nature Materials · 2004 · 461 citations

Materials Science, Chemical Engineering, Membrane Formation +6

Properties of High-Performance Porous SiOC Low-k Film Fabricated Using Electron-Beam Curing

Takashi Yoda, K. Fujita, Hideshi Miyajima et al. · Japanese Journal of Applied Physics · 2005 · 26 citations

Materials Engineering, Materials Science, Electrical Engineering +15

Diffusivities of Tris(2,2′-bipyridyl)ruthenium inside Silica- Nanochannels Modified with Alkylsilanes

A. Yamaguchi, Takashi Yoda, Shintaro Suzuki et al. · Analytical Sciences · 2006 · 26 citations

Functional Nanomaterials, Inorganic Chemistry, Silica- Nanochannels Modified +2

Structural Studies of High-Performance Low-k Dielectric Materials Improved by Electron-Beam Curing

Takashi Yoda, Yasushi Nakasaki, Hideki Hashimoto et al. · Japanese Journal of Applied Physics · 2005 · 18 citations

Optical Materials, X-ray Spectroscopy, Engineering +22

High-reliability tungsten-stacked via process with fully converted TiAl/sub 3/ formation annealing

R. Shohji, Mitsuru Uda, T. Nakamura et al. · IEEE Transactions on Semiconductor Manufacturing · 1999 · 14 citations

Engineering, Chemical Deposition, Metal Annealing +17

Rows per page

1–5 of 6