Concepedia

Mitsuru Uda

MU

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Publications

1

Citations

14

H-Index

1

Active since

1999

Affiliations

IBM Research - Tokyo(Current)

Mitsuru Uda is an author at IBM Research - Tokyo specializing in electronic packaging, materials engineering, and engineering.

Top concepts

Publications per year

1999–1999

1

Publications

1

High-reliability tungsten-stacked via process with fully converted TiAl/sub 3/ formation annealing

R. Shohji, Mitsuru Uda, T. Nakamura et al. · IEEE Transactions on Semiconductor Manufacturing · 1999 · 14 citations

, , +17

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