D. Marx

Gaseous dopant sources in MOMBE/CBE

M. Weyers, J. Musolf, D. Marx et al. · Journal of Crystal Growth · 1990 · 57 citations

Natural Sciences, Chemistry, Materials Science +5

Metalorganic molecular beam epitaxy and etching of GaAs and GaSb using trisdimethylaminoarsenic and trisdimethylaminoantimony

H. Asahi, X.F. Liu, K. Inoue et al. · Journal of Crystal Growth · 1994 · 35 citations

Engineering, Materials Engineering, Materials Science +12

Sputtered AlN thin films on Si and electrodes for MEMS resonators: relationship between surface quality microstructure and film properties

Sergey Mishin, D. Marx, B. Sylvia et al. · 2004 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +17

Low temperature etching of GaAs substrates and improved morphology of GaAs grown by metalorganic molecular beam epitaxy using trisdimethylaminoarsenic and triethylgallium

D. Marx, H. Asahi, X.F. Liu et al. · Journal of Crystal Growth · 1995 · 23 citations

Engineering, Electrical Engineering, Materials Science +14

Selective area growth of GaN/AlN heterostructures

D. Marx, Z. Kawazu, Takeshi Nakayama et al. · Journal of Crystal Growth · 1998 · 17 citations

Engineering, Materials Engineering, Materials Science +14