Neil Benjamin

The use of Langmuir probes and optical emission spectroscopy to measure electron energy distribution functions in RF-generated argon plasmas

T I Cox, V. G. I. Deshmukh, D. A. O. Hope et al. · Journal of Physics D Applied Physics · 1987 · 97 citations

Engineering, Langmuir Probes, Optical Emission Spectroscopy +17

Energy distribution of ions bombarding biased electrodes in high density plasma reactors

Erik A. Edelberg, Andrew Perry, Neil Benjamin et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 87 citations

Electrical Engineering, Engineering, Radio Frequency +10

An electrostatic probe technique for RF plasma

Nicholas Braithwaite, Neil Benjamin, J. E. Allen · Journal of Physics E Scientific Instruments · 1987 · 86 citations

Electrical Engineering, Electrostatic Probe Technique, Engineering +9

Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces

Erik A. Edelberg, Andrew Perry, Neil Benjamin et al. · Review of Scientific Instruments · 1999 · 52 citations

Engineering, Plasma Science, Plasma Physics +21

High-impedance capacitive divider probe for potential measurements in plasmas

Neil Benjamin · Review of Scientific Instruments · 1982 · 38 citations · Full text

Electrical Engineering, Plasma Electronics, Engineering +14