Concepedia

Glenn W. Gale

GW

Statistics

Publications

9

Citations

267

H-Index

9

Active since

1995

Affiliations

Clarkson University(Current)

IBM (United States)

Tokyo Electron (Japan)

Lam Research (Austria)

Glenn W. Gale is an author at Clarkson University specializing in semiconductor devices, materials science, and engineering.

Publications per year

1995–2009

9

Publications

9

An Experimental Study of Megasonic Cleaning of Silicon Wafers

Ahmed Busnaina, Ismail Kashkoush, Glenn W. Gale · Journal of The Electrochemical Society · 1995 · 87 citations

Engineering, Materials Engineering, Materials Science +16

ROLES OF CAVITATION AND ACOUSTIC STREAMING IN MEGASONIC CLEANING

Glenn W. Gale, Ahmed Busnaina · Particulate Science And Technology · 1999 · 64 citations

Engineering, Physics, Acoustics +14

Enhancement of Semiconductor Wafer Cleaning by Chelating Agent Addition

Glenn W. Gale, D.L. Rath, Emanuel I. Cooper et al. · Journal of The Electrochemical Society · 2001 · 31 citations · Full text

Natural Sciences, Chemistry, Materials Science +12

Novel photoresist stripping technology using ozone/vaporized water mixture

Hitoshi Abe, Hayato Iwamoto, Takayuki Toshima et al. · IEEE Transactions on Semiconductor Manufacturing · 2003 · 19 citations

Engineering, Electrical Engineering, Materials Engineering +13

Removal of Nano-Particles by Aerosol Spray: Effect of Droplet Size and Velocity on Cleaning Performance

Ke Xu, Stefan Pichler, Kurt Wostyn et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2009 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +17

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