Merritt Funk

Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge

Lin Xu, Lee Chen, Merritt Funk et al. · Applied Physics Letters · 2008 · 45 citations

Electrical Engineering, Engineering, Glow Discharge +6

Measurement of electron temperatures and electron energy distribution functions in dual frequency capacitively coupled CF4/O2 plasmas using trace rare gases optical emission spectroscopy

Zhiying Chen, Vincent M. Donnelly, Demetre J. Economou et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 37 citations

Engineering, Optical Emission Spectroscopy, Plasma Physics +20

Feedforward of mask open measurements on an integrated scatterometer to improve gate linewidth control

Matthew Sendelbach, W. Natzle, Charles N. Archie et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 29 citations

Electrical Engineering, Wafer Scale Processing, Engineering +15

Integrated scatterometry in high-volume manufacturing for polysilicon gate etch control

Matthew Sendelbach, A.G. Muñoz, K. Bandy et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 23 citations

Engineering, Measurement, Education +17

End-boundary sheath potential, electron and ion energy distribution in the low-pressure non-ambipolar electron plasma

Lee Chen, Zhiying Chen, Merritt Funk · Plasma Sources Science and Technology · 2013 · 13 citations

Engineering, Plasma Science, Energetic Electron Beam +17