Concepedia

Katsumi Ukai

KU

2

Publications

59

Citations

2

H-Index

1979

Active since

Affiliations

Canon Anelva (Japan)(Current)

Katsumi Ukai is an author at Canon Anelva (Japan) specializing in engineering, applied physics, and microelectronics.

Top concepts

EngineeringApplied PhysicsSurface ScienceMicroelectronicsPhysicsAtomic PhysicsInstrumentationOptoelectronicsMaterial ScienceIntegrated Circuits

Publications per year

1979–1990

2

Publications

2

End-point determination of aluminum reactive ion etching by discharge impedance monitoring

Katsumi Ukai, Kunio Hanazawa · Journal of Vacuum Science and Technology · 1979 · 45 citations · Full text

Electrical Engineering, Discharge Impedance Monitoring, Engineering +15

Damage formed by electron cyclotron resonance plasma etching on a gallium arsenide surface

Tohru Hara, Jun Hiyoshi, Hiromi Hamanaka et al. · Journal of Applied Physics · 1990 · 14 citations

Materials Science, Radiation Chemistry, Ion Implantation +14

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