Concepedia

Kunio Hanazawa

KH

1

Publications

45

Citations

1

H-Index

1979

Active since

Affiliations

Canon Anelva (Japan)(Current)

Kunio Hanazawa is an author at Canon Anelva (Japan) specializing in engineering, optoelectronics, and instrumentation.

Top concepts

Publications per year

1979–1979

1

Publications

1

End-point determination of aluminum reactive ion etching by discharge impedance monitoring

Katsumi Ukai, Kunio Hanazawa · Journal of Vacuum Science and Technology · 1979 · 45 citations · Full text

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