Statistics
Publications
1
Citations
35
H-Index
1
Active since
2016
Affiliations
GlobalFoundries (United States)(Current)
S.-T. Chen is an author at GlobalFoundries (United States) specializing in engineering, materials engineering, and computer engineering.
Publications per year
2016–2016
1
1
BEOL process integration for the 7 nm technology node
T. Standaert, Genevieve Beique, H.-C. Chen et al. · 2016 · 35 citations
Engineering, Electron-beam Lithography, Device Integration +17
1–1 of 1