A. See

Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition

M.-Y. Ho, Hao Gong, G. D. Wilk et al. · Journal of Applied Physics · 2003 · 181 citations

Hfo2 Thin Films, Engineering, Transmission Electron Microscopy +16

Suppressed crystallization of Hf-based gate dielectrics by controlled addition of Al2O3 using atomic layer deposition

M.-Y. Ho, Hao Gong, G. D. Wilk et al. · Applied Physics Letters · 2002 · 102 citations

Aluminium Nitride, Engineering, Crystal Growth Technology +22

Annealing of ultrashallow p+/n junction by 248 nm excimer laser and rapid thermal processing with different preamorphization depths

Y. F. Chong, K. L. Pey, Andrew T. S. Wee et al. · Applied Physics Letters · 2000 · 79 citations

Different Preamorphization Depths, Engineering, Laser Ablation +19

Near-field Raman imaging using optically trapped dielectric microsphere

Johnson Kasim, Ting Yu, You Meng et al. · Optics Express · 2008 · 55 citations · Full text

Optical Materials, Engineering, Microscopy +19

Applications of micro-Raman spectroscopy in salicide characterization for Si device fabrication

Feng Zhao, S. Y. Chen, Zexiang Shen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 29 citations

Si Raman Signal, Engineering, Surface-enhanced Raman Scattering +22