Statistics
Publications
1
Citations
29
H-Index
1
Active since
2003
Affiliations
National University of Singapore(Current)
S. Y. Chen is an author at National University of Singapore specializing in silicon materials, electronic material characterization, and semiconductor devices.
Publications per year
2003–2003
1
1
Applications of micro-Raman spectroscopy in salicide characterization for Si device fabrication
Feng Zhao, S. Y. Chen, Zexiang Shen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 29 citations
Natural Sciences, Materials Engineering, Materials Science +17
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