Concepedia

Daisuke Uchikawa

DU

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Publications

6

Citations

396

H-Index

6

Active since

1999

Affiliations

Nagoya University(Current)

Daisuke Uchikawa is an author at Nagoya University specializing in surface science, materials science, and etching processes.

Publications per year

1999–2002

6

Publications

6

Differences in anisotropic etching properties of KOH and TMAH solutions

Mitsuhiro Shikida, Kazuo Sato, Kenji Tokoro et al. · Sensors and Actuators A Physical · 2000 · 253 citations

, , +9

Surface roughness of single-crystal silicon etched by TMAH solution

Mitsuhiro Shikida, Takehiro Masuda, Daisuke Uchikawa et al. · Sensors and Actuators A Physical · 2001 · 51 citations

, , +16

Surface morphology of anisotropically etched single-crystal silicon

Mitsuhiro Shikida, Kenji Tokoro, Daisuke Uchikawa et al. · Journal of Micromechanics and Microengineering · 2000 · 32 citations

, , +16

Anisotropic etching properties of silicon in KOH and TMAH solutions

Kenji Tokoro, Daisuke Uchikawa, Mitsuhiro Shikida et al. · 2002 · 22 citations

, , +16

Comparison of anisotropic etching properties between KOH and TMAH solutions

Mitsuhiro Shikida, K. Satō, Kenji Tokoro et al. · 1999 · 20 citations

, , +17

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