E. Forsén

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

E. Forsén, G. Abadal, Sara Ghatnekar‐Nilsson et al. · Applied Physics Letters · 2005 · 118 citations · Full text

Engineering, Ultrasensitive Mass Sensor, Biomedical Engineering +16

Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit

J. Verd, G. Abadal, J. Teva et al. · Journal of Microelectromechanical Systems · 2005 · 66 citations

Engineering, Cmos Readout Circuit, Mechanical Engineering +17

Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

Sara Ghatnekar‐Nilsson, E. Forsén, G. Abadal et al. · Nanotechnology · 2004 · 44 citations

Thin Film Electrodes for High Temperature Surface Acoustic Wave Devices

Denny Richter, S. Sakharov, E. Forsén et al. · Procedia Engineering · 2011 · 39 citations · Full text

Materials Science, Electrical Engineering, Engineering +15

System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

María Villarroya, J. Verd, J. Teva et al. · Sensors and Actuators A Physical · 2006 · 36 citations

Multiple Detection, Engineering, Sensors +10