María Villarroya

Zeolite-modified cantilevers for the sensing of nitrotoluene vapors

Miguel Urbiztondo, Ismael Pellejero, María Villarroya et al. · Sensors and Actuators B Chemical · 2009 · 68 citations

Materials Science, Chemical Engineering, Engineering +5

System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

María Villarroya, J. Verd, J. Teva et al. · Sensors and Actuators A Physical · 2006 · 36 citations

Multiple Detection, Engineering, Sensors +10

A platform for monolithic CMOS-MEMS integration on SOI wafers

María Villarroya, E. Figueras, J. Montserrat et al. · Journal of Micromechanics and Microengineering · 2006 · 21 citations

Electrical Engineering, Crystalline Silicon, Engineering +13

AFM lithography for the definition of nanometre scale gaps: application to the fabrication of a cantilever-based sensor with electrochemical current detection

María Villarroya, Francesc Pérez‐Murano, Cristina Martin‐Olmos et al. · Nanotechnology · 2004 · 21 citations

Engineering, Biochemical Sensors, Biomedical Engineering +24

Development of etching processes for the micropatterning of silicalite films

Ismael Pellejero, Miguel Urbiztondo, María Villarroya et al. · Microporous and Mesoporous Materials · 2008 · 16 citations

Materials Science, Materials Engineering, Engineering +10