Publication | Closed Access
System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection
36
Citations
27
References
2006
Year
Multiple DetectionEngineeringSensorsMicrofabricationSensor ArrayChip Mass SensorComputer EngineeringSensor DesignInstrumentationSensor ApplicationSensor TechnologyMicro-electromechanical SystemPolysilicon Cantilevers Arrays
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