Statistics
Publications
10
Citations
213
H-Index
10
Active since
2002
Yoshitaka Komuro is an author at Tokyo Ohka Kogyo (Japan) specializing in natural sciences, materials science, and chemistry.
Publications per year
2002–2022
10
10
Patterning performance of chemically amplified resist in EUV lithography
Tatsuya Fujii, Shogo Matsumaru, Tomotaka Yamada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 25 citations
Engineering, Manufacturing Engineering, Materials Science +13
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