Carlos Ferreira

Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography

Inês S. Garcia, Carlos Ferreira, Joana D. Santos et al. · Journal of Microelectromechanical Systems · 2020 · 28 citations · Full text

Engineering, Manufacturing Engineering, Mechanical Engineering +17

Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography

D. Aguiam, Joana D. Santos, Carlos Silva et al. · Micro and Nano Engineering · 2022 · 23 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

A Fast and Precise Tool for Multi-Layer Planar Coil Self-Inductance Calculation

Andreia Faria, L. Marques, Carlos Ferreira et al. · Sensors · 2021 · 20 citations · Full text

Engineering, Computational Engineering, Electrical Engineering +15

Nanoimprint lithography for grayscale pattern replication of MEMS mirrors in a 200 mm wafer

Inês S. Garcia, A. Retolaza, Carlos Ferreira et al. · Journal of Manufacturing Processes · 2024 · 12 citations · Full text

Engineering, Manufacturing Engineering, Materials Science +17

Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response

Nuno Brito, Carlos Ferreira, Filipe S. Alves et al. · Sensors · 2016 · 10 citations · Full text

Engineering, Computer Engineering, Electrical Engineering +17