Takeshi Kada

Fabrication of refractive index distributions in polymer using a photochemical reaction

Takeshi Kada, Atsushi Obara, Toshiyuki Watanabe et al. · Journal of Applied Physics · 2000 · 33 citations

Natural Sciences, Chemistry, Materials Science +17

Volatile CVD precursor for Ni film: cyclopentadienylallylnickel

Takeshi Kada, Masato Ishikawa, H. Machida et al. · Journal of Crystal Growth · 2004 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +11

Ni Precursor for Chemical Vapor Deposition of NiSi

Masato Ishikawa, Takeshi Kada, Hideaki Machida et al. · Japanese Journal of Applied Physics · 2004 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +17

Novel Precursor for Development of Si–C₂H₄–Si Networks in SiCH for Application as a Low-k Cap Layer beyond 22 nm Nodes

Hideharu Shimizu, Nobuo Tajima, Takeshi Kada et al. · Japanese Journal of Applied Physics · 2010 · 17 citations

Engineering, Materials Engineering, Materials Science +17

HfO₂ and Hf_1–_<i>x</i>Si_<i>x</i>O₂ Thin Films Grown by Metal‐Organic CVD Using Tetrakis(diethylamido)hafnium

Yoshio Ohshita, Atsushi Ogura, Masato Ishikawa et al. · Chemical Vapor Deposition · 2006 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +10