Statistics
Publications
20
Citations
419
H-Index
15
Active since
1998
Y. Takabayashi is an author at SAGA Light Source specializing in engineering, applied physics, and physics.
Publications per year
1998–2018
20
20
Laser-produced-plasma light source development for extreme ultraviolet lithography
Hiroshi Komori, Tamotsu Abe, Takashi Suganuma et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 24 citations
Extreme Ultraviolet Lithography, Engineering, Laser Plasma Physics +15
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