Nishant Sirse

Kinetics of highly vibrationally excited O₂(<i>X</i>) molecules in inductively-coupled oxygen plasmas

Adriana Annušová, Daniil Marinov, Jean‐Paul Booth et al. · Plasma Sources Science and Technology · 2018 · 73 citations

Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma

Sarveshwar Sharma, Nishant Sirse, P. K. Kaw et al. · Physics of Plasmas · 2016 · 57 citations · Full text

Engineering, Glow Discharge, Plasma Science +19

Influence of driving frequency on the metastable atoms and&#13;\nelectron energy distribution function in a capacitively coupled&#13;\nargon discharge

Sarveshwar Sharma, Nishant Sirse, M. M. Turner et al. · Dublin City University Open Access Institutional Repository (Dublin City University) · 2018 · 43 citations · Full text

Surface loss rates of H and Cl radicals in an inductively coupled plasma etcher derived from time-resolved electron density and optical emission measurements

G. A. Curley, L. Gatilova, S. Guilet et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2010 · 40 citations

Engineering, Plasma Physics, Chemistry +21

Plasma density and ion energy control via driving frequency and applied&#13;\nvoltage in a collisionless capacitively coupled plasma discharge

Sarveshwar Sharma, Abhijit Sen, Nishant Sirse et al. · Dublin City University Open Access Institutional Repository (Dublin City University) · 2018 · 40 citations · Full text