Concepedia

Chishio Koshimizu

CK

Statistics

Publications

3

Citations

67

H-Index

3

Active since

2009

Affiliations

Tokyo Electron (Japan)(Current)

Wakayama University

Nagoya University

Chishio Koshimizu is an author at Tokyo Electron (Japan) specializing in materials science, engineering, and semiconductor devices.

Publications per year

2009–2011

3

Publications

3

Direct current superposed dual-frequency capacitively coupled plasmas in selective etching of SiOCH over SiC

Tsuyoshi Yamaguchi, Tatsuya Komuro, Chishio Koshimizu et al. · Journal of Physics D Applied Physics · 2011 · 32 citations

Engineering, Materials Engineering, Materials Science +17

Low-Coherence Interferometry-Based Non-Contact Temperature Monitoring of a Silicon Wafer and Chamber Parts during Plasma Etching

Chishio Koshimizu, Takayuki Ohta, Tatsuo Matsudo et al. · Applied Physics Express · 2010 · 18 citations

Engineering, Electrical Engineering, Materials Science +17

Simultaneous measurement of substrate temperature and thin-film thickness on SiO2/Si wafer using optical-fiber-type low-coherence interferometry

Takayuki Ohta, Chishio Koshimizu, Kanta Kawasaki et al. · Journal of Applied Physics · 2009 · 17 citations

Engineering, Materials Engineering, Materials Science +17

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