Concepedia

Kanta Kawasaki

KK

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Publications

1

Citations

17

H-Index

1

Active since

2009

Affiliations

Tokyo Electron (Japan)(Current)

Kanta Kawasaki is an author at Tokyo Electron (Japan) specializing in materials engineering, online monitoring, and optical thin films.

Publications per year

2009–2009

1

Publications

1

Simultaneous measurement of substrate temperature and thin-film thickness on SiO2/Si wafer using optical-fiber-type low-coherence interferometry

Takayuki Ohta, Chishio Koshimizu, Kanta Kawasaki et al. · Journal of Applied Physics · 2009 · 17 citations

Engineering, Materials Engineering, Materials Science +17

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