Concepedia

Tatsuo Matsudo

TM

Statistics

Publications

5

Citations

161

H-Index

5

Active since

1997

Affiliations

Tokyo Electron (Japan)(Current)

National Institute of Advanced Industrial Science and Technology

University of Yamanashi

Takeda (Japan)

Tatsuo Matsudo is an author at Tokyo Electron (Japan) specializing in natural sciences, optics, and surface physics.

Publications per year

1997–2010

5

Publications

5

Optical Anisotropy of Oxidized Si(001) Surfaces and Its Oscillation in the Layer-By-Layer Oxidation Process

Tetsuji Yasuda, Satoshi Yamasaki, Matsuhiko Nishizawa et al. · Physical Review Letters · 2001 · 50 citations

, , +17

Direct detection of evanescent electromagnetic waves at a planar dielectric surface by laser atomic spectroscopy

Tatsuo Matsudo, Hirokazu Hori, Tetsuya Inoue et al. · Physical Review A · 1997 · 44 citations

, , +16

Pseudomomentum transfer from evanescent waves to atoms measured by saturated absorption spectroscopy

Tatsuo Matsudo, Yūichirō Takahara, Hirokazu Hori et al. · Optics Communications · 1998 · 28 citations

, , +15

Observation of oscillating behavior in the reflectance difference spectra of oxidized Si(001) surfaces

Tatsuo Matsudo, Tomohiro Ohta, Tetsuji Yasuda et al. · Journal of Applied Physics · 2002 · 21 citations

, , +17

Low-Coherence Interferometry-Based Non-Contact Temperature Monitoring of a Silicon Wafer and Chamber Parts during Plasma Etching

Chishio Koshimizu, Takayuki Ohta, Tatsuo Matsudo et al. · Applied Physics Express · 2010 · 18 citations

, , +17

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