Statistics
Publications
2
Citations
50
H-Index
2
Active since
2011
Affiliations
Nagoya University(Current)
Tatsuya Komuro is an author at Nagoya University specializing in plasma-surface interactions, plasma physics, and silicon etching.
Publications per year
2011–2017
2
2
Yoshinobu Ohya, Kenji Ishikawa, Tatsuya Komuro et al. · Journal of Physics D Applied Physics · 2017 · 18 citations · Full text
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