Teruo Iwasaki

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Active since

1991

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Teruo Iwasaki is an author at National Institute of Advanced Industrial Science and Technology specializing in optics, industrial inspection, and engineering.

Publications per year

1991–2009

Publications

Development of actinic full-field EUV mask blank inspection tool at MIRAI-Selete

Tsuneo Terasawa, Takeshi Yamane, Toshihiko Tanaka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 42 citations

Engineering, Electrical Engineering, Instrumentation +11

Actinic Mask Blank Inspection and Signal Analysis for Detecting Phase Defects Down to 1.5 nm in Height

Tsuneo Terasawa, Takeshi Yamane, Toshihiko Tanaka et al. · Japanese Journal of Applied Physics · 2009 · 21 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Multiple scattered electron-beam effect in electron-beam lithography

Norio Saitou, Teruo Iwasaki, Fumio Murai · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1991 · 10 citations

Natural Sciences, Materials Science, Physics +13

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