V. Liberman

Liquid immersion lithography: Why, how, and when?

M. Rothschild, T. M. Bloomstein, Roderick R. Kunz et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 49 citations

Materials Science, Optical Materials, Engineering +14

Experimentation and modeling of organic photocontamination on lithographic optics

Roderick R. Kunz, V. Liberman, D. K. Downs · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 41 citations

Organic Precursor, Optical Materials, Engineering +17

High-index immersion lithography with second-generation immersion fluids to enable numerical aperatures of 1.55 for cost effective 32-nm half pitches

Roger H. French, V. Liberman, Hoang V. Tran et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 22 citations

Numerical Aperatures, Optical Materials, Engineering +24

A Pilot Trial of a Computerized Renal Template Note to Improve Resident Knowledge and Documentation of Kidney Disease

Rui Wang, Dennis G. Moledina, V. Liberman et al. · Applied Clinical Informatics · 2013 · 16 citations · Full text

Prospects for photolithography at 121 nm

V. Liberman, M. Rothschild, Peter G. Murphy et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 14 citations

Short Wavelength Optic, Optical Materials, Engineering +18