Statistics
Publications
6
Citations
800
H-Index
6
Active since
1983
Affiliations
Grant Willson is an author at The University of Texas at Austin specializing in natural sciences, materials science, and materials engineering.
Publications per year
1983–2005
6
6
Mark M. Green, Michael P. Reidy, Robert D. Johnson et al. · Journal of the American Chemical Society · 1989 · 699 citations
Understanding the photoresist surface-liquid interface for ArF immersion lithography
Will Conley, Robert J. LeSuer, Frank F. Fan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 20 citations
Natural Sciences, Materials Engineering, Materials Science +14
1–5 of 6